Semicorex varias praebet unctas 4H et 6H SiC. Fabrica et lagana subiecta multos annos fabrica fuimus. Nostra 4 Inch High Purity Semi-Insulating HPSI SiC Duplex latus politum Wafer Substratum bonum pretium commodum habet et maxime mercatus Europae et Americanae obtegunt. Expectamus ad longum tempus socium in Sinis fieri.
Semicorex integram carbidam silicon (SiC) lagani productam lineam, inclusis 4H et 6H substratam cum N-typo, P-type et lagana semi-insulating alta puritatis, possunt esse cum vel sine epitaxy.
Introducendo nostram aciem sectionis 4 Inch High Purity Semi-Insulating HPSI SiC Duplex latus politum Wafer Substratum, top-of-linea producto destinatum ad postulandas postulationes electronicarum et semiconductorium applicationum provectorum.
4 Inch High Purity Semi-Insulating HPSI SiC Duplex latus politum Wafer Substratum maxime adhibetur in communicationibus 5G, systematibus radar, ductu capitis, satellitibus communicationibus, warplanis et aliis agris, commoda amplificandi RF range, ultra longi temporis intervallum. identificatio, anti-jamming et summus celeritas, summus capacitas informationum translationis et aliarum applicationum, consideratur maxime idealis subiectum pro Proin potentiae cogitationibus faciendis.
Formularium:
Diameter: 4″
Geminus-politus
l Grade: Productio, Investigatio, Donec
4H-SiC HPSI Wafer
● Crassitudo: 500±25 μm
●l Micropipe densitas: ≤1 ea/cm2~ ≤10 ea/cm2
Items |
Productio |
Inquisitionis |
phantasma |
Crystal Parameters |
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Polytypus |
4H |
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Superficiem directio in-axis |
<0001> |
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Superficiem orientationis off-axis |
0±0.2° |
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(0004) FWHM |
≤45arcsec |
≤60arcsec |
≤1OOarcsec |
Electrical Parameters |
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Type |
HPSI |
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Resistentia |
≥1 E9ohm·cm |
% area > 1 E5ohm·cm |
70% area > 1 E5ohm·cm |
Mechanica Parameters |
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Diameter |
99.5 - 100mm |
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Crassitudo |
500±25 μm |
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Prima plana propensionis |
[1-100]±5° |
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Prima plana longitudo |
32.5±1.5mm |
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Secundarium plana positione |
90° CW a primo plano ± 5°. Pii faciem sursum |
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Secundarium planae longitudinis |
18±1.5mm |
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TTV |
≤5 μm |
≤10 μm |
≤20 μm |
LTV |
≤2 μm(5mm*5mm) |
≤5 μm(5mm*5mm) |
QUOD' |
Arcum |
-15μm ~ 15μm |
-35μm ~ 35μm |
-45μm ~ 45μm |
Warp |
≤20 μm |
≤45 μm |
≤50 μm |
Frons (Si-face) asperitas (AFM) |
Ra≤0.2nm (5μm*5μm) |
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Structure |
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Micropipe density |
≤1 ea/cm2 |
≤5 ea/cm2 |
≤10 ea/cm2 |
Inclusio density carbonis |
≤1 ea/cm2 |
QUOD' |
|
Hexagonal inanis |
Nullus |
QUOD' |
|
Metallum immunditiae |
≤5E12atoms/cm2 |
QUOD' |
|
Ante Quality |
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Front |
And |
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Superficiem metam |
Si-face CMP |
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Particulas |
≤60ea/laganum (size≥0.3μm) |
QUOD' |
|
Exasperat |
≤2ea/mm. Cumulativo longitudo ≤Diameter |
Cumulative length≤2*Diameter |
QUOD' |
Orange cortices / foveas / maculas / striations / rimas / contagione |
Nullus |
QUOD' |
|
Ora eu / indents / fractura / hex p |
Nullus |
||
Polytypus areis |
Nullus |
Cumulativo area≤20% |
Cumulativo area≤30% |
Ante laser vestigium |
Nullus |
||
Back Quality |
|||
Retro metam |
C-faciem CMP |
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Exasperat |
≤5ea/mm,Cumulative length≤2*Diameter |
QUOD' |
|
Retro defectus (ore eu / indents) |
Nullus |
||
Retro asperitatem |
Ra≤0.2nm (5μm*5μm) |
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Back laser notati |
I mm (a summo ore) |
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Ore |
|||
Ore |
Chamfer |
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Packaging |
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Packaging |
Sacculus interior nitrogeni repletus est, et sacculus exterior vacuumedtur. laganum multi-reta epi-parata. |
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*Nota "NA" nullum significat petitionem Items not mentioned may refer to SEMI-STD. |