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6 Inch N-type SiC Wafer
  • 6 Inch N-type SiC Wafer6 Inch N-type SiC Wafer
  • 6 Inch N-type SiC Wafer6 Inch N-type SiC Wafer

6 Inch N-type SiC Wafer

Semicorex varias praebet unctas 4H et 6H SiC. Fabrica et lagana multos annos fuimus. Nostra duplex-polita 6 Inch N-type SiC Wafer bonum pretium commodum habet et maxime mercatus Europae et Americanus tegunt. Expectamus ad longum tempus socium in Sinis fieri.

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depictio producti

Semicorex integram carbidam silicon (SiC) lagani productam lineam, inclusis 4H et 6H substratam cum N-typo, P-type et lagana semi-insulating alta puritatis, possunt esse cum vel sine epitaxy. Nostrum 4-inch N-type SiC (carbide pii) substrata est species lagani summus qualitas ex uno crystallo carbidi pii cum N-typo doping, quod duplex politum est.

6 Inch N-type SiC Wafer maxime adhibetur in novis vehiculis energiae, summus intentionis transmissionis et substationis, bona alba, impedimenta alta velocitatis, motores electrici, inverters photovoltaici, potentiae pulsus commeatus et alii agri, quae habent commoda instrumentorum minuendi. industria detrimentum, instrumentorum melioris firmitas, instrumentorum amplitudo minuens et instrumentorum melioris effectus, et commoda irreparabilia in electronicis artibus faciendis habent.

Items

Productio

Inquisitionis

phantasma

Crystal Parameters

Polytypus

4H

Superficiem sexualis errore

<11-20>4±0.15°

Electrical Parameters

Dopant

n-genus Nitrogenium

Resistentia

0.015-0.025ohm·cm

Mechanica Parameters

Diameter

150.0±0.2mm

Crassitudo

350±25 μm

Prima plana propensionis

[1-100]±5°

Prima plana longitudo

47.5±1.5mm

Secundarium plana

Nullus

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Arcum

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Frons (Si-face) asperitas (AFM)

Ra≤0.2nm (5μm*5μm)

Structure

Micropipe density

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Metallum immunditiae

≤5E10atoms/cm2

QUOD'

BPD

≤1500 ea/cm2

≤3000 ea/cm2

QUOD'

TSD

≤500 ea/cm2

≤1000 ea/cm2

QUOD'

Ante Quality

Front

And

Superficiem metam

Si-face CMP

Particulas

≤60ea/laganum (size≥0.3μm)

QUOD'

Exasperat

≤5ea/mm. Cumulativo longitudo ≤Diameter

Cumulative length≤2*Diameter

QUOD'

Orange cortices / foveas / maculas / striations / rimas / contagione

Nullus

QUOD'

Ora eu / indents / fractura / hex p

Nullus

Polytypus areis

Nullus

Cumulativo area≤20%

Cumulativo area≤30%

Ante laser vestigium

Nullus

Back Quality

Retro metam

C-faciem CMP

Exasperat

≤5ea/mm,Cumulative length≤2*Diameter

QUOD'

Retro defectus (ore eu / indents)

Nullus

Retro asperitatem

Ra≤0.2nm (5μm*5μm)

Back laser notati

I mm (a summo ore)

Ore

Ore

Chamfer

Packaging

Packaging

Epi-paratum in vacuo packaging

Multi laganum cassette packaging

*Nota "NA" nullum significat petitionem Items not mentioned may refer to SEMI-STD.





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