Semicorex varias praebet unctas 4H et 6H SiC. Fabrica et elit carbidi Pii per multos annos fuimus. Nostra duplex expolitur 6 Inch Semi-Insulating HPSI SiC Wafer bonum pretium commodum habet ac plurimas mercatus Europae et Americanae tegunt. Expectamus ad longum tempus socium in Sinis fieri.
Semicorex integram carbidam silicon (SiC) lagani productam lineam, inclusis 4H et 6H substratam cum N-typo, P-type et lagana semi-insulating alta puritatis, possunt esse cum vel sine epitaxy.
Diameter 6 unciae nostrae 6 Inch Semi-Insulating HPSI SiC Wafer magnam aream superficiei praebet ad fabricandas potentias electronicas cogitationes sicut MOSFETs, Schottky Diodes, et alia applicationes altae intentionis. 6 Inch Semi-Insulating HPSI SiC Wafer maxime adhibitum est in 5G communicationibus, systematibus radar, ductu capitis, satellitibus communicationibus, warplanis et aliis campis, cum emolumentis identitatis RF amplificandi, identitatis ultra-longae, anti-jamming et altae. -speed, summus capacitas informationum applicationum transferendi, consideratur maxime idealis subiecta ad fabricandas proin potentias machinas.
Formularium:
Diameter: 6″
-Duplex-politus
Gradus: Productio, Research, Dummy
4H-SiC HPSI Wafer
● Crassitudo: 500±25 μm
● Micropipe densitas: ≤1 ea/cm2~ ≤15 ea/cm2
Items |
Productio |
Inquisitionis |
phantasma |
Crystal Parameters |
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Polytypus |
4H |
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Superficiem directio in-axis |
<0001> |
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Superficiem orientationis off-axis |
0±0.2° |
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(0004) FWHM |
≤45arcsec |
≤60arcsec |
≤1OOarcsec |
Electrical Parameters |
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Type |
HPSI |
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Resistentia |
≥1 E8ohm·cm |
% area > 1 E5ohm·cm |
70% area > 1 E5ohm·cm |
Mechanica Parameters |
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Diameter |
150±0.2 mm |
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Crassitudo |
500±25 μm |
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Prima plana propensionis |
[1-100] ± 5° vel Notch |
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Prima longitudo plana / profundum |
47.5± 1.5mm vel 1 - 1.25mm |
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TTV |
≤5 μm |
≤10 μm |
≤15 μm |
LTV |
≤3 μm(5mm*5mm) |
≤5 μm(5mm*5mm) |
≤10 μm(5mm*5mm) |
Arcum |
-15μm ~ 15μm |
-35μm ~ 35μm |
-45μm ~ 45μm |
Warp |
≤35 μm |
≤45 μm |
≤55 μm |
Frons (Si-face) asperitas (AFM) |
Ra≤0.2nm (5μm*5μm) |
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Structure |
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Micropipe density |
≤1 ea/cm2 |
≤10 ea/cm2 |
≤15 ea/cm2 |
Inclusio density carbonis |
≤1 ea/cm2 |
QUOD' |
|
Hexagonal inanis |
Nullus |
QUOD' |
|
Metallum immunditiae |
≤5E12atoms/cm2 |
QUOD' |
|
Ante Quality |
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Front |
And |
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Superficiem metam |
Si-face CMP |
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Particulas |
≤60ea/laganum (size≥0.3μm) |
QUOD' |
|
Exasperat |
≤5ea/mm. Cumulativo longitudo ≤Diameter |
Cumulativus length≤300mm |
QUOD' |
Orange cortices / foveas / maculas / striations / rimas / contagione |
Nullus |
QUOD' |
|
Ora eu / indents / fractura / hex p |
Nullus |
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Polytypus areis |
Nullus |
Cumulativo area≤20% |
Cumulativo area≤30% |
Ante laser vestigium |
Nullus |
||
Back Quality |
|||
Retro metam |
C-faciem CMP |
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Exasperat |
≤5ea/mm,Cumulative length≤2*Diameter |
QUOD' |
|
Retro defectus (ore eu / indents) |
Nullus |
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Retro asperitatem |
Ra≤0.2nm (5μm*5μm) |
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Back laser notati |
"SEMI" |
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Ore |
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Ore |
Chamfer |
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Packaging |
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Packaging |
Epi-paratum in vacuo packaging Multi laganum cassette packaging |
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*Nota "NA" nullum significat petitionem Items not mentioned may refer to SEMI-STD. |